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Pozycja Modelling and optimization of electrostatic membrane-based actuators(Wydawnictwo Politechniki Łódzkiej, 2011) Maj, CezaryThe paper presents methods of electrostatic membrane-based actuators modelling. Based on a combination of the classical and reduced model, a simplified approach fully describing the membrane behaviour under hydrostatic and electrostatic load for various conditions, is proposed. The obtained results have been verified experimentally for various shapes of membranes. Furthermore, a new complex tool for simulation and optimization has been developed.